servo rs 3100

Servo RS ™ 3100 Series
Servo RS ™ 3100 Series

Model 3100 Standard Features

  • Smooth cast iron plates
  • Fixed bottom plate
  • Self-aligning swivel-mounted top plate
  • Independently programmable top plate, ring gear, and center gear rotation using servo motor motion controls
  • Stainless steel ring and center sprockets with spring pins
  • Servo-controlled downforce with load cell feedback
  • Retractable ring gear
  • Thick-section plates and sub-plates for improved flatness and stability
  • Automatic slurry feed system
    • • Pump and mixer are remote controlled by process recipe
    • • Slurry tank and distribution lines, with recirculation available
    • • Variable speed propeller-style mixer with controls at mixer motor
    • • Variable speed, reversible peristaltic pump with controls at panel
  • Automatic flush water system and hand sprayer
    • • Flush water is controlled by process recipe
    • • Flush flow control valve and distribution lines
    • • Teflon hand-held sprayer
    • • All components are compatible with deionized water
  • On-site machine install, set-up, and training
  • One year warranty
Servo RS ™ 3100 Series

Model 3100 Optional Features

  • Counter-rotating bottom plate 4-way configuration
  • Plates
    • • Serrated cast iron for lapping
    • • Stainless steel for polishing or fixed abrasive lapping
  • Stainless steel roller pins on ring and center sprockets
  • Digital guage
    • • Thickness control for lapping
    • • Crash protection for lapping and polishing
  • Automatic Lapping Control (ALC)
  • Water heated and cooled bottom plate temperature control system
  • Slurry system
    • • Recirculating slurry
    • • Multiple or high-capacity peristaltic feed heads and distribution lines
    • • Centrifuge system
    • • Slurry tank heating and cooling system
    • • Variety of customizable configurations available
  • Chemical injection system
    • • Auxiliary peristaltic pump and tank system
    • • Chemical injection pump controlled by process recipe
  • Wide variety of accessories available

Model 3100 Machine Controls

  • Touchscreen Operator Interface
    • • Familiar platform
    • • Replacement PC/components readily available
    • • Easily accessible storage point for reference files
  • Capacity to store up to 31 recipes
    • • Each recipe may contain up to 14 ramp or lap steps
    • • Programmable ramp steps change speed and loads precisely
    • • Lap steps are steady process steps that are controlled by the timer or thickness control gauge.
  • Parameters controlled in each process step
    • • Top plate, ring gear and center gear RPM
    • • Load
    • • Slurry flow, chemical injection flow and flush water
    • • Time/duration
    • • Load proportioning for partial batch sizes
    • • Automatic speed calculation for symmetrical (top/bottom) removal
  • 2-hand controls to raise and lower top plate
    • • Rapid traverse above programmable float point
    • • Slow, smooth lowering onto parts from float point
  • Automatic plate or polishing pad flattening
    • • Cycles between automatically calculated "High" and "Low" mode speeds for center gear and ring gear to facilitate plate or polishing pad flattening
    • • Programmable Autocycle intervals: Continuous or alternating cycles
  • Hour meter with alarm for maintenance scheduling
  • Low slurry alarm
  • Password protection with multiple levels of access
  • Touch Screen Interface

What's New

Now Introducing – CXT Templates – Chemically Resistant Templates

Designed specifically to be used with SiC wafers - CXT templates are a single shell construction that provides improved COO and increases life time while reducing machine down time - please contact us to find out more!

Learn More